Fine line width measurement system


High precision auto measurement systems using 3CCD high definition digital camera High speed microscope AF +AF image capture for line width Auto high precision measurement specialized for bottom or inside, outside or profile display etc.

6 mega pixels 30fps Color C Mount 1/1.8 CCD Mini Camera Link


Model MT-3600LW
Image sensor 1/1.8 3CCD digital camera
Pixel numbers 1636(H) x 1236(V) x 3RGB, Appx.6mega pixels
Video output Camera link
Digital image measurement Line width measurement
Measurement repeatability 3σ=0.01μm(object 100x,10times repeat measure of base scale with AF)
Minimum display 0.001μm
Line width edge detection Selectable, inside-inside, outside-outside
Calibration Registration up to 20 kinds of various magnification lenses
Data output Save measurement data as CSV file
Computer unit and OS PC/AT compatible, windows7
External interface RS-232C, USB 2.0, LAN
Auto focus unit(option) Image processing of digital camera image signal
Image processing of digital camera image signal
Focus accuracy appx. 1/3 focal point depth of object lens
AF detection position AF setting at any points or area in the image field
Z axis control 5 phase stepping motor coupler
Z axis resolution 0.005μm

High definition color digital display and image filing

3600_01Color image observation is the most important factor for any microscopy operations. 2 mega pixels digital camera assures the clear color images of florescent pictures, depth difference of resist or DIC, for image filing or measurement process