Auto line width/size measurement system


Low cost 3D measurement system for depth or size measurement comprised of various digital camera (selectable) and AF function image processing unit. 3D measurements are enabled with image AF functions and simple operation image processing tool.


  • Accurate repeating measurements of tilted lines are possible due to the advanced technology image processing algorithm
  • Measurement of line width, circle diameter, area, angle, circle arc, distance, etc.
  • Abundant expandability such as, depth measurement or auto XY axis, auto measurement adding with stage and control software etc.
  • Line width measurements for LCD color filter or resist
  • For semiconductor wafer or glass masks
  • For TAB, COF, lead frame portions
  • For electronic parts portions


Model MT-5000VP
Optical system Microscope Compact incident light microscope(lens 5X)
Object lens 10x
Lighting LED lighting green, PC controllable
Z axis stage Stroke+- 10mm, resolution 0.1μm
XY stage stroke+ – 25mm, resolution 0.002nm
Θstage manual stroke + – 120
Dimensions 350(W) x 290(D) x 390(H)mm
Camera portion Effective pixels 2448(H) x 2050(V), 5 mega pixels, 16fps
Optical size 2/3” format
Shutter speed 10s~1/10,000s(variable setting)
AF image process unit OS Windosw7 pro 32bit
Spec CPU core i7, memory:4G HDD250GB
Setting items Line width measurement, distance measurement, manual measurement; MILETOS
Minimum display 0.001μm
Parallel I/O Connection to sequencer, open collector
Calibration Register up to 20 kinds by lens magnification
Data output Save measurement result as CSV, or measurement results images as (BPM/JPG)
Auto focus functions Digital camera image process method
AF focus point accuracy Within 1/3 focal point depth
AF detection position AF setting is possible at any position in the image or area
Dimensions 350(W)×290(D)×390(H)mm