Tracking auto focus unit


Tracking auto focus system with microscope/AF image processor package Built-in detection target mark with lighting 2 projected circle patterns on actual image objects for detection of focal points to calculate the center of the gravity Tracking AF by controlling the stage motor of microscope to hold the focal points


Model TRK2
Focus method projected pattern for the center gravity calculation + image contrast method
Selection of camera AF sensor camera, 2 mega pixels Measurement camera (customer’s choice, C mount)
Tracking range + - 100μm(object lens 10x)
Measurement repeatability + - 1μm(object lens 10x)
Z axis minimum display 0.01μm
Microscope cylinder upright tri-ocular cylinder microscope with projected patterns (use one for AF), C mount
Object lens selection among, 5x, 10x, 20x, 50x, 100x
Image process unit VP-5
OS Windows7 professional 32bit
CPU Intel core i7 processor
Memory 4GB
HDD 3.5” SATA, 500GB
Extension slot PCI Express(16x) x1, PCI Express(4x) x1, PCI(32bit) x2
Interface USB2.0 x6, RS232C(D-sub 9pin male) x2, LAN x2(10BASE-T, 100BASE-TX, 1000BASE-T)


    • Constant AF tracking of focal points
    • Hybrid AF functions; projected pattern tracking + image AF
    • Free selection of high pixels, high sensitivity or high speed cameras
    • Height and depth real time display
    • AF tracking on semiconductor wafer surface or transparent film
    • Track the focusing on undulated movement works
  • Abundant image measurement software available



  • Glass masks, film inspection & measurement
  • Visual inspection for FPD or semiconductor wafers
  • Repair equipment; LCD, OLED, MEMS
  • Microscope observation, measurement system
  • Glass masks inspection



System configurations